Multilayer Piezo Actuators

A piezoelectric element is a polarized ceramic or crystalline material that experiences mechanical deformation when an electrical charge is applied. The electrical charge creates a linear movement and force. Piezo actuators utilize this principle to achieve their precise linear movement, high force generation, and high load capabilities. This makes piezo stack actuators suitable for high precision applications. In addition, the piezo stack actuator device can give an extremely fast response as well as high acceleration rates.

Multilayer piezo stack actuators are created by arranging multiple layers of piezoelectric materials on top of each other. This can be accomplished in two ways: either the components are fired separately and connected later via adhesive (discrete stacks; the components are normally discs), or they are co-fired and bound by subjecting them to intense heat and pressure, or sintering (monolithic stacks). The underlying principle of stack piezo actuators is the intrinsic quality of constancy. The charge generated is independent of the size of the ceramic a user is working with (this is mathematically modeled by the longitudinal effect). Thus, putting many pieces together creates a multiplicative effect on their transformations’ magnitude for the same voltage, amplifying their power.

The primary difference between the two types of stack piezoelectric actuators is the operating voltage. Co-fired multilayer piezo actuators typically have a lower operational voltage of up to 200V whereas monolithic actuators have a higher range of up to 1000V. This operating voltage range is predetermined during the manufacturing process, introducing a higher voltage outside of the operating range will not cause the multilayer piezo actuators to deform further than the specified amount. Operating outside of the voltage range is not recommended, as this can destroy the piezo stack.

Multilayer piezo stack actuators are powerful sources of force generation and can be manufactured in various shapes and sizes.
piezo stack
Multilayer stack piezo actuators by Piezo Direct

Multilayer stack piezo actuators are often used as linear electromechanical drivers to move parts in a small and precise amount. In most cases, displacement can reach up to 0.13% of the total product length within a millisecond. In nearly all cases, displacement is linear to the voltage applied, and accuracy is in the range of nanometers. Because of the precise displacement, a secondary sensor is not necessary, unlike other types of actuators.

Piezo Direct’s multilayer piezo stack actuators are constructed with hundreds of inner electrodes and thin ceramic layers, which are sintered to form a monolithic stack actuator with a maximum single device height of 60 mm. Please note that discrete stacks can be built taller than monolithic stacks.

We offer a variety of multilayer piezo stack actuators. Shape, finish, material, dimensions, and performance levels can all be customized! Piezo Direct’s piezo stacks are suitable for numerous applications. Unsure what you need? Contact us! Piezo Direct is more than happy to work with you to design a custom piezo part to meet your application requirements. If none of these products match your requirements, click here to learn more about working with our engineers to build a custom piezo component.

 

Nano-positioning
Precise machining
Piezo positioning stage
Microscope and Imaging
3D Printer
Linear motors
Pumps, Valve drive

OClics
Fiber position
Add/Drop multiplexer
OClics switch
AdaClive oClics
Tunable lasers

Medical & Life Science
Micro-pumps
Piezo valve for drug dispenser

Aerospace & Automobile
Thrusters
Active trailing edge
Fuel injector for common rail system

Piezoelectric Injection Valve
Non-contact dispense
IC dispense
LED dispense
Camera module dispense

Multilayer Piezo Rectangular Actuators

*Red wire (+), #333333 wire (-)

Multilayer Piezo Ring Actuators

*Red wire (+), #333333 wire (-)

Multilayer Piezo Circular Actuators

*Red wire (+), #333333 wire (-)

Multilayer Piezo Special-Shaped Actuators

*Red wire (+), #333333 wire (-)

Custom Designs

Tips mounted type
Strain gauge glued type

Specifications – Rectangular Actuators

PDJ150 Series for Rectangular Actuators – Max. driving voltage = 150VDC

ModelDimensions LxWxH [mm]Nominal Displacement [µm@150V] ±10%Blocking Force [N@150V]Stiffness [N/µm]Capacitance [µF@1V,1kHz] ±20%Resonant Frequency [kHz] ±20%
PDJ15003030413x3x54330800.14300
PDJ15003030513x3x65330660.18250
PDJ15003031013x3x1010330330.30150
PDJ15003021813x2x1818250140.6083
PDJ15003031813x3x1818330180.5083
PDJ15005050515x5x659001800.44250
PDJ1500505101 5x5x1010900900.80150
PDJ15005052015x5x1820900451.5083
PDJ15005053015x5x2830900302.4053
PDJ15005054015x5x3640900283.0052
PDJ1500505402 5x5x3440900282.9044
PDJ15005054035x5x4044900203.6037
PDJ1500505601 5x5x5460900154.5028
PDJ15007071017x7x1010180018011.60150
PDJ15007072017x7x18201800903.0083
PDJ15007073017x7x28301800604.7053
PDJ15007073817x7x32381800475.3047
PDJ15007074017x7x36401800456.1042
PDJ1500707501 7x7x42501800366.9036
PDJ150101010110x10x101036003603.20150
PDJ1501010201 10x10x182036001806.0083
PDJ150101030110x10x283036001209.2053
PDJ1501010401 10x10x364036009012.0042
PDJ150101050110x10x465036007215.2033
PDJ150101060110x10x546036006618.0028
PDJ150141410114x14x101072007206.20150
PDJ150141420114x14x2020720036013.1075
PDJ150141430114x14x3030720024019.3050
PDJ1501414401 14x14x4040720018026.2037

PDJ200 Series for Rectangular Actuators – Max. driving voltage = 200VDC

ModelDimensions LxWxH [mm]Nominal Displacement [µm@200V] ±10%Blocking Force [N@200V]Stiffness [N/µm]Capacitance [µF@1V,1kHz] ±20%Resonant Frequency [kHz] ±20%
PDJ20003030513x3x65330660.15250
PDJ20003031013x3x1010330330.27150
PDJ20005050515x5x659001800.20250
PDJ20005051015x5x1010900900.52150
PDJ20005051215x5x1212900750.43125
PDJ2000505201 5x5x1820900450.6783
PDJ20005053015x5x2830900301.1053
PDJ20005053025x5x3030900301.1050
PDJ2000505401 5x5x3640900231.3442
PDJ20005054025x5x3540900231.3443
PDJ20007071017x7x101018001800.69150
PDJ20007072017x7x18201800901.3083
PDJ20007073017x7x28301800602.0053
PDJ20007073817x7x32381800472.4047
PDJ2000707401 7x7x36401800452.6042
PDJ20007075017x7x42501800363.1036
PDJ200101010110x10x101036003601.50150
PDJ200101020110x10x182036001802.7083
PDJ200101030110x10x283036001204.3053
PDJ200101040110x10x36403600905.5042
PDJ200141410114x14x101072007202.80150
PDJ200141420114x14x202072003605.8075
PDJ200141430114x14x303072002408.6050
PDJ200141440114x14x4040720018012.0037

Specifications – Ring Actuators

PDH150 Series for Ring Actuators – Max. driving voltage = 150VDC

ModelDimensions OD/ID/H [mm]Nominal Displacement [µm@150V] ±10%Blocking Force [N@150V]Stiffness [N/µm] Capacitance [µF@1V,1kHz] ±20%Resonant Frequency [kHz] ±20%
PDH1500525051Φ5/Φ2.5/656001200.3250
PDH1500525101Φ5/Φ2.5/1010700700.5150
PDH1500525201Φ5/Φ2.5/1820700351.083
PDH1500845101Φ8/Φ4.5/101013001300.8150
PDH1500845201Φ8/Φ4.5/18201300651.583
PDH1501006101Φ9.5/Φ5.5/101015001501.2150
PDH1501005101Φ10/Φ5.5/101015001501.2150
PDH1501205201Φ12/Φ5/202034001706.075
PDH1501206101Φ12/Φ6/101030002202.4150
PDH1501206161Φ12/Φ6/16183000122494
PDH1501206201Φ12/Φ6/20223000100575
PDH1501304201 Φ13/Φ4/202236001637.275
PDH1502015051Φ20/Φ15/6540008001.4250
PDH1502619201Φ26/Φ19/1820720036001483

PDH200 Series for Ring Actuators – Max driving voltage = 200VDC

ModelDimensions OD/ID/H [mm]Nominal Displacement [µm@200V] ±10%Blocking Force [N@200V]Stiffness [N/µm]Capacitance [µF@1V,1kHz] ±20%Resonant Frequency [kHz] ±20%
PDH2001304201Φ13/Φ4/202036001804.674
PDH2002015051 Φ20/Φ15/6540008001.3250
PDH2002619201Φ26/Φ19/182072003607.780
PDH2001304401Φ13/Φ4/40403600909.237
PDH2002619351Φ26/Φ19/3535720020515.343

High Pressure Series for Ring Actuators – Max. driving voltage = 1000VDC

ModelDimensions OD/ID/H [mm] Nominal Displacement [µm] ±10%Blocking Force [N]Stiffness [N/µm]Capacitance [µF@1V,1kHz] ±20%Resonant Frequency [kHz] ±20%
PDH2501203201Φ12/Φ3/2020@250V3500@250V1754.675
PDH2502515301Φ25/Φ15/3030@250V9000@250V30013.550

Specifications – Circular Actuators

PDY150 Series for Round Actuators – Max. driving voltage = 200VDC

ModelDimensions
OD/H
[mm]
Nominal Displacement
[μm] ±10%
Blocking Force
[N]
Stiffness
[N/μm]
Capacitance
[μF@1v,1kHz] ±20%
Resonant Frequency
[kHz] ±20%
PDY15014241Φ14.2/2424@150V7500@150V3121662
PDY15014481Φ14.2/4848@150V7500@150V1563031
PDY15014201Φ14.7/20 220@150V7500@150V3751375
PDY15014401Φ14.7/4040@150V7500@150V1882738
PDY20014051Φ14.2/65@150V7500@200V15001.4250

Specifications – Special-shaped Actuators

PDT150 Series for Special-shaped Actuators – Max. driving voltage = 150VDC

ModelDimensions
ID/ID/H
[mm]
Nominal Displacement
[μm@150V] ±10%
Blocking Force
[N@150V]
Stiffness
[N/μm]
Capacitance
[μF@1v,1kHz] ±20%
Resonant Frequency
[kHz]±20%
PDT1500808041617.5×7.5/Φ3.5/161616001001.694

Remarks

  1. Measuring voltage range: 0 to150V and/or 0 to 200V and/or 0 to 1000V
  2. Recommended preload for dynamic operation: 15MPa
  3. Maximum preload for constant force: 20MPa
  4. Operating voltage: -20 to 150V DC and/or -20 to 200V DC
  5. Operating temperature range: -20° to 120°
  6. Wire lead, the red is for electrode (+) and the #333333 is for electrode (-)

 

*Customization available on request

*All specifications are subject to changes, please check with Piezo Direct before ordering

  1. The actuator must be placed vertically on a table and the table must be keCI level before testing. The test contactor must be set vertically on the table and keCI kept in contact with the center of top of the actuator during testing.
  2. Only DC voltage should be applied
  3. The red lead wire is the positive (+) and the #333333 lead wire is the negative (-).
Figure 1: Installation and Application Method

Testing Curve

Figure 2: Displacement vs. Voltage Diagram (quasi-static)
Figure 4: Displacement vs. Voltage Diagram (dynamic)
Figure 4: Displacement vs. Voltage Diagram (dynamic)
Figure 3: Displacement vs. Voltage Diagram (quasi-static)
Figure 5: Capacitance vs. Temperature Diagram (quasi-static)
Figure 7: Displacement vs. Blocking Force Diagram (dynamic)

Mount and Connect

  1. The actuator should be connected in-line with the element, and be driven by rigid connection.
  2. No load is prohibited. Please apply 20Mpa preload if response time is below 100μs. Please refer to the tables below for details.
  3. Do not apply a voltage exceeding max. driving voltage value to the actuator
  4. The actuator should be used in a dry atmosphere below 75% RH and in a range of temperature -20~120℃ Otherwise, a drop in insulation resistance or shortened working life may occur.
  5. The resin-coated type of actuator is weak to a tensile force because of its structure. As a result, the direction of the generated force must be the same as the center axis of the actuator. Please see the examples shown below.

Preload Force for Rectangle Actuators

Length [mm] Width [mm] Normal Pressure [MPa] Max. Pressure [MPa] Proposal Preload Force [N] Max. Preload Force [N]
3 3 15 20 135 180
5 5 15 20 375 500
7 7 15 20 735 980
10 10 15 20 1500 2000
14 14 15 20 2940 3920

Preload Force for Ring Actuators

Length [mm] Width [mm] Normal Pressure [MPa] Max. Pressure [MPa] Proposal Preload Force [N] Max. Preload Force [N]
5 2.5 15 20 220 300
8 4.5 15 20 510 690
10 5.5 15 20 820 1100
12 5 15 20 1400 1870
12 6 15 20 1400 1870
10 5.5 15 20 700 940
20 15 15 20 2060 2750
13 4 15 20 1800 2400
26 19 15 20 3700 4950
12 3 15 20 1590 2120
25 15 15 20 4710 6280
Outer Diameter [mm] Normal Pressure [MPa] Max. Pressure [MPa] Proposal Preload [N] Max. Preload [N]
14.2 15 20 2400 3200
14.7 15 20 2500 2400

Preload Force for Special-Shaped Actuators

Length [mm] Width [mm] ID [mm] Normal Pressure [MPa] Max. Pressure [MPa] Proposal Preload [N] Max. Preload [N]
7.5 7.5 3.5 15 20 700 940